Reactive sputtering of manganese and titanium
- 1 May 1968
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 1 (6) , 475-480
- https://doi.org/10.1016/0040-6090(68)90074-6
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Solid-State Anodic Oxidation of TantalumJournal of the Electrochemical Society, 1966