Axial radio frequency electric field intensity and ion density during low to high mode transition in argon electron cyclotron resonance discharges
- 1 March 1991
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 9 (2) , 339-347
- https://doi.org/10.1116/1.585572