A compact electron-gun evaporation source for highly stable evaporation of refractory metals
- 1 December 1993
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 64 (12) , 3647-3648
- https://doi.org/10.1063/1.1144245
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Electron-gun evaporators of refractory metals compatible with molecular beam epitaxyJournal of Vacuum Science & Technology A, 1985