Explosive crystallization of a-Si films in both the solid and liquid phases
- 1 November 1981
- journal article
- conference paper
- Published by AIP Publishing in Applied Physics Letters
- Vol. 39 (9) , 724-726
- https://doi.org/10.1063/1.92862
Abstract
In this letter, we show that explosive crystallization can occur sequentially along the same laser scan line either from the liquid phase or in the solid phase. Which phase dominates depends on the laser scan speed, the proximity of the a‐Si melting isotherm, and the magnitude of the ’’thermal kick’’ provided by fluctuations in laser power or at localized regions of higher absorption.Keywords
This publication has 4 references indexed in Scilit:
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- Explosive crystallization of amorphous germaniumApplied Physics Letters, 1981
- Crystallization-front velocity during scanned laser crystallization of amorphous Ge filmsApplied Physics Letters, 1980
- cw laser anneal of polycrystalline silicon: Crystalline structure, electrical propertiesApplied Physics Letters, 1978