Microfabricated scanning tunneling microscope
- 1 November 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Electron Device Letters
- Vol. 10 (11) , 490-492
- https://doi.org/10.1109/55.43113
Abstract
A scanning tunneling microscope (STM) with dimensions 1000 mu m*200 mu m*8 mu m constructed by planar microfabrication techniques is discussed. The device incorporates a piezoelectric actuator capable of three-dimensional motion for scanning and control of the tunneling gap spacing. Operation of the device has been successfully demonstrated by imaging the surface of a graphite sample with atomic resolution.Keywords
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