Nature of damage in diamond implanted at low temperatures

This publication has 10 references indexed in Scilit:

• Thermoelectric material development. Final report
  Published by Office of Scientific and Technical Information (OSTI) ,1994
• A determination of the critical damage density required for “amorphisation” of ion-implanted diamond
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1994
• Ion beam modification of diamond
  Diamond and Related Materials, 1993
• Carrier activation and mobility of boron-dopant atoms in ion-implanted diamond as a function of implantation conditions
  Physical Review B, 1993
• Ion beam modification and dopant activation in diamond
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1993
• Ion-implanted structures and doped layers in diamond
  Materials Science Reports, 1992
• Diamond cold cathode
  IEEE Electron Device Letters, 1991
• Ion beam induced conductivity in chemically vapor deposited diamond films
  Applied Physics Letters, 1990
• Ohmic contacts formed by ion mixing in the Si-diamond system
  IEEE Transactions on Electron Devices, 1989
• Characterization of Boron-Doped Diamond Film
  Japanese Journal of Applied Physics, 1989