Beam focusing characteristics of silicon microtips with an in-plane lens
- 1 March 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 44 (3) , 498-502
- https://doi.org/10.1109/16.556161
Abstract
Single microtips, 2\ud72 and 10\ud710 arrays of microtips surrounded by an integrated focusing ring, were fabricated and their focusing characteristics experimentally investigated. Observation of the beam on a phosphor screen shows that the focusing is very effective for single microtips and 2\ud72 arrays; moreover, the reduction in emitted current is much smaller than for double-gate focusing. 10\ud710 arrays of microtips, however, do not generate very focused beams. These results agree well with simulations. The possibility of simultaneous focusing and deflecting is also discussed, and a new structure combining the advantages of double-gate and surrounding ring focusing is suggested.Peer reviewed: YesNRC publication: YeKeywords
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