Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactuators by Sol-Gel Processing
- 1 January 1996
- journal article
- Published by Ceramic Society of Japan in Journal of the Ceramic Society of Japan
- Vol. 104 (1207) , 159-163
- https://doi.org/10.2109/jcersj.104.159
Abstract
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