Surface studies of the thermal decomposition of triethylgallium on GaAs (100)
- 1 October 1990
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 105 (1-4) , 199-202
- https://doi.org/10.1016/0022-0248(90)90361-n
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A model for the surface chemical kinetics of GaAs deposition by chemical-beam epitaxyJournal of Applied Physics, 1988
- Metalorganic Chemical Vapor DepositionAnnual Review of Materials Science, 1982