Oxidation of sub-50 nm Si columns for light emission study

• 1 November 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 10  (6) , 2846-2850
• https://doi.org/10.1116/1.585971

Abstract

Keywords

• LIGHT EMISSION
• NM SI
• EMISSION STUDY
• SI COLUMNS
• OXIDATION OF SUB