An IC Absolute Pressure Transducer With Built-In Reference Chamber*
- 18 January 2018
- book chapter
- Published by Taylor & Francis
- p. 133-136
- https://doi.org/10.1201/9781351073516-21
Abstract
A new technique for batch fabricating miniature piezoresistive absolute pressure transducers is described. The process makes use of the advanced state-of-the-art of monolithic integrated circuit (IC) processing and anodic bonding, which is a means for hermetically sealing glass to silicon. Advantages of the process include low cost, small size, and improved performance, particularly in regard to long-term drift, which has been measured at <1 mmHg/month.This publication has 1 reference indexed in Scilit:
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969