High Temperature Thermal Processing for Ulsi Applications

• 1 January 1995
• journal article
• Published by Springer Nature in MRS Proceedings
• Vol. 387
• https://doi.org/10.1557/proc-387-201

Abstract

Keywords

• DIVERSITY
• THERMAL
• MODELED
• EQUIPMENT
• TEMPERATURE MEASUREMENT SYSTEMS
• FURNACE
• BATCH
• THROUGHPUT
• SEMICONDUCTOR