Elastomeric binary phase gratings for measuring acceleration, displacement, strain, and stress
- 1 September 1996
- journal article
- conference paper
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 67 (9) , 3310-3319
- https://doi.org/10.1063/1.1147413
Abstract
This article describes the fabrication and operating principles of a device suitable for measuring displacements, stresses, strains, accelerations, and forces. The device consists of an elastomeric material with a surface relief diffraction grating embossed on its surface. Mechanical compression of this element changes the way that it diffracts light. This article also describes designs and performance characteristics of simple accelerometers and pressure sensors based on these devices.Keywords
This publication has 2 references indexed in Scilit:
- A non-contacting ultrasonic phase-sensitive displacement measurement systemMeasurement Science and Technology, 1995
- Finite-element modelling as a tool for designing capacitive position sensorsSensors and Actuators A: Physical, 1995