Laser Induced Surface Chemical Epitaxy
- 23 February 1990
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1190, 35-40
- https://doi.org/10.1117/12.963975
Abstract
Studies of the thermal and photon-induced surface chemistry of dimethyl cadmium (DMCd) and dimethyl tellurium (DMTe) on GaAs(100) substrates under ultrahigh vacuum conditions have been performed for substrate temperatures in the range of 123 K to 473 K. Results indicate that extremely efficient conversion of admixtures of DMTe and DMCd to CdTe can be obtained using low power (5 - 10 mJ cm-2) 193 nm laser pulses at substrate temperatures of 123 K. Subsequent annealing at 473 K produces an epitaxial film.Keywords
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