Recent progress in thin film shape memory microactuators

• 24 August 2005
• conference paper
• Published by Institute of Electrical and Electronics Engineers (IEEE)
• p. 216
• https://doi.org/10.1109/memsys.1995.472577

Abstract

Keywords

• TRANSISTORS
• MICROACTUATORS
• VALVES
• ACTUATORS
• SHAPE MEMORY ALLOYS
• CONSUMER ELECTRONICS
• COSTS
• SUBSTRATES
• MICROMECHANICAL DEVICES
• VOLTAGE