Measurement of contact resistance distribution using a 4k-contacts array
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Semiconductor Manufacturing
- Vol. 9 (1) , 9-14
- https://doi.org/10.1109/66.484277
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Measurement of contact resistance distribution using a 4k contacts arrayPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1995
- Inverter performance of 0.10 μm CMOS operating at room temperatureIEEE Transactions on Electron Devices, 1994
- Experimental Study Of Threshold Voltage Fluctuations Using An 8k MOSFET's ArrayPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1993