Silicon-On-Sapphire Waveguides

10 March 1987

proceedings article
Published by SPIE-Intl Soc Optical Eng

Vol. 704, 24-26
https://doi.org/10.1117/12.937191

Abstract

The first silicon-on-sapphire optical waveguides have been demonstrated. Waveguiding at λ=1.3 microns has been observed in silicon films 0.95 and 1.5 microns thick and in raised strip structures 1.5 microns thick.

Keywords

REFRACTIVE INDEX
THEORY
WAVEGUIDES
FABRICATION
CHIP
ELECTRONICS
SILICON ON SAPPHIRE
STRUCTURES
INDEXATION
ATOMIC STRUCTURE
PENETRATION
DEPTH
SILICON ON INSULATOR
OPTICAL WAVEGUIDES
OPTICAL WAVEGUIDE
SILICON

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