Mass Spectrometric Sampling Probe for Discharge Plasmas

Abstract
A versatile sampling technique is described which permits a more definitive study of ion extraction and plasma sheath formation in discharge plasmas. The ionic species from the plasma are sampled into a quadrupole mass spectrometer through a metal leak arrangement which itself acts as a probe. This behavior is substantiated by sampling probe characteristics, and charge density and electron temperature determinations for a flowing microwave discharge plasma in nitrogen at low pressure.

This publication has 14 references indexed in Scilit: