Abstract
The quality of MBE-grown Si/SiGe heterojunction bipolar transistors (HBTs) was improved by inserting a well-defined undoped SiGe layer between the neutral base and the collector. The DC characteristics and the long-term stability of these non-selfaligned devices proved to be excellent, and the transit frequency reached 33 GHz (VCB = 1V). Those features are essential preconditions for future application in highspeed ICs.

This publication has 0 references indexed in Scilit: