Temperature effects on positive electron resists irradiated with electron beam and deep-UV light

• 1 May 1982
• journal article
• research article
• Published by Wiley in Journal of Applied Polymer Science
• Vol. 27  (5) , 1441-1452
• https://doi.org/10.1002/app.1982.070270503

Abstract

Keywords

• DEEP UV
• PMMA
• IRRADIATED RESISTS
• ELECTRON BEAM IRRADIATION
• FLOW
• POLY