X-Ray Energy Spectrometry in the 0.1 to 10 Å Range

Abstract
Energy spectrometry utilizing a solid-state detector (silicon) for X-ray elemental analysis is described, and compared with wavelength spectrometry. Parameters which influence the spectrometers energy resolution, energy detection range, and countrate capabilities are reviewed. Measured performance of a spectrometer (200 eV FWHM resolution for 6.404 keV radiation) is demonstrated for both X-ray and electron specimen excitation.