INSTRUMENTATION, ELECTRON OPTICS AND X-RAY SPECTROSCOPY
- 1 February 1984
- journal article
- Published by EDP Sciences in Le Journal de Physique Colloques
- Vol. 45 (C2) , C2-149
- https://doi.org/10.1051/jphyscol:1984233
Abstract
Recent instrumental developments in the field of electron probe instrumentation are reviewed. These include electron guns, lens systems and back-scattered electron (z contrast) detectors. Desirable changes in instrumental design are discussed for the analysis of thin specimens by the use of energy dispersive spectrometersKeywords
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