Ion-Implanted Arsenic Profiles in GaAs Encapsulated by SiO2and Si3N4

• 1 October 1978
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 17  (10) , 1881-1882
• https://doi.org/10.1143/jjap.17.1881

Abstract

Keywords

• ARSENIC
• ION IMPLANTATION