Analysis of an ambient temperature influence on the thermal thin-film microsensor
- 1 December 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 45 (3) , 169-172
- https://doi.org/10.1016/0924-4247(94)00832-9
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- A high sensitivity CMOS gas flow sensor on a thin dielectric membraneSensors and Actuators A: Physical, 1993
- Thermal thin-film sensors for r.m.s. Value measurementsSensors and Actuators A: Physical, 1991
- Narrow-bandgap semiconductor-based thermal sensorsSensors and Actuators A: Physical, 1991