The Fundamentals of Quantitative Electron-Probe Microanalysis

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Abstract
Emission-concentration proportionality Is one of the main features of electronprobe mlcroanalysis. It can be interpreted by taking simultaneously Into account the Z/A factor of Webster's law of deceleration and the variation with atomic number of the backscattering ratio. The baclcscattering ratio itself can be deduced approximately from experimental distribution curves of thecharacteristicemisslonjejqpertments on copper-gold alloys show good agreement with the theoretical predictions. An important practical consequence is that regulation of the electron beam falling onto the specimen leads to better results than regulation of the current passing through it. The different corrections are discussed, with special reference to the fluorescence induced by the general continuous spectrum. The case of insulating materials is considered separately; preliminary experiments seem to show that their behavior is not essentially different from that of conducting materials.

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