Microstrain and macrostrain profiles in ZnSe epitaxial layers

Abstract
We present a microprobe Raman scattering study of the strain in a ZnSe heterostructure with GaAs, Ge, and Si. Measurements taken at adjacent sites of different distances from the interface prove Raman scattering to be a very powerful tool for detecting the strain and distinguishing between local high strains and macroscopic low strains.