Interface States and Field-Effect Mobility in 6H-SiC MOS Transistors

• 1 February 1998
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 264-268, 1013-1016
• https://doi.org/10.4028/www.scientific.net/msf.264-268.1013

Abstract

Keywords

• BANDTAILS
• FIELD-EFFECT
• INTERFACE STATES (OR TRAPS)
• METAL-OXIDE-SEMICONDUCTOR FIELD EFFECT TRANSISTOR (MOSFET)
• MOBILITY