Atomic excitations in sputtering processes
- 1 January 1982
- journal article
- review article
- Published by Taylor & Francis in Radiation Effects
- Vol. 60 (1-4) , 119-127
- https://doi.org/10.1080/00337578208242783
Abstract
The sputtering of Mg, Cu, Zn, Cia, Au, and TI by Xe+ impact has been studied by optical spectrometry in a 10−9 Torr vacuum. The excitation functions are compared with total sputtering yields. The relative level populations of the sputtered particles follow an (n*)p behavior, almost identical to that for gas single collisions and beam-foil excitations, whereas two intensity distributions based on local thermodynamic equilibrium are shown not to be satisfied.Keywords
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