Monte Carlo simulation of 1–10-keV electron scattering in an aluminum target

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Abstract
New Monte Carlo simulations of electron scattering based on the single scattering model have been performed in the low-energy region for an aluminum target, where two basic equations are required, namely the elastic scattering cross section and the energy-loss rate. We investigated the screened Rutherford equation and the Mott equation for two different atomic potentials for the former, and the Rao Sahib-Wittry equation (the modified Bethe equation) for the latter. The validity of each model is discussed in a comparison between Monte Carlo results and experimental results such as the electron range, electron backscattering, and electron transmission which have been reported by various authors. Consequently, it was found that a combination of the Mott cross section and the Rao Sahib-Wittry equation showed the best accuracy. However, the accuracy of a previous model with the screened Rutherford equation is not as bad as aniticipated because of the higher accuracy of the Born approximation for light elements such as Al, compared to Au.