Free-Volume-Dependent Atomic Diffusion in Compositionally Modulated Amorphous Co-Zr Films

Abstract
Atomic interdiffusion in compositionally modulated amorphous Co-Zr films was investigated by means of in situ X-ray diffraction measurements during successive isothermal annealing. The results were analyzed as free-volume-dependent atomic diffusion and activation-type temperature dependence of both the atomic diffusion coefficient, and the annihilation rates of free volume were confirmed with the activation energy Q D=8.84(±0.41)×104 J/mol and Q A=3.77(±0.96)×104 J/mol, respectively.

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