Deposition of preferentially oriented AIN thin film by reaction ion plating.

• 1 January 1991
• journal article
• Published by The Surface Finishing Society of Japan in Journal of The Surface Finishing Society of Japan
• Vol. 42  (5) , 535-540
• https://doi.org/10.4139/sfj.42.535

Abstract

Keywords

• THIN FILM
• REACTION ION
• PREFERENTIALLY ORIENTED
• ION PLATING
• ORIENTED AIN
• AIN THIN
• DEPOSITION