Low-order models for fast dynamical simulation of MEMS microstructures
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 2, 1101-1104
- https://doi.org/10.1109/sensor.1997.635392
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- The use of the Karhunen-Loève decomposition for the modeling of distributed parameter systemsChemical Engineering Science, 1996
- Stability Analysis of Gas-Lubricated, Self-Acting, Plain, Cylindrical, Journal Bearings of Finite Length, Using Galerkin’s MethodJournal of Basic Engineering, 1965