A compact, low-cost system for sub-100 nm x-ray lithography

• 1 November 1990
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 8  (6) , 1648-1651
• https://doi.org/10.1116/1.585133

Abstract

Keywords

• NM X
• RAY LITHOGRAPHY
• COMPACT
• COST SYSTEM
• SUB