Microfabricated suspensions for electrical connections on the tunable elastomer membrane
- 13 December 2004
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 85 (24) , 6051-6053
- https://doi.org/10.1063/1.1835553
Abstract
Electrical connections through microfabricated suspensions on a pneumatically pumped elastomer membrane were demonstrated. A method to fabricate the suspensions on the elastomer membrane was developed. The elastomer membrane was 1 mm in diameter and 120 μm in thickness. Resistances of the microfabricated suspensions measured across the elastomer membrane were within 1% difference when the membrane’s center deflection ranged from 0 to 100 μm, which corresponded to a numerical aperture change from 0 to 0.2 as well as a 2.6% elongation of the elastomer.Keywords
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