X-ray diffraction characterization of multilayer semiconductor structures

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 4  (6) , 3153-3159
• https://doi.org/10.1116/1.573645

Abstract

Keywords

• X RAY DIFFRACTION CHARACTERIZATION
• SEMICONDUCTOR STRUCTURES
• MULTILAYER SEMICONDUCTOR