Ballistic-electron emission microscopy studies of charge trapping in SiO2

• 1 July 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (4) , 2864-2871
• https://doi.org/10.1116/1.588846

Abstract

Keywords

• CHARGE TRAPPING
• BALLISTIC ELECTRON
• EMISSION MICROSCOPY
• MICROSCOPY STUDIES
• ELECTRON EMISSION