Spectroscopic infrared ellipsometry by means of FTS
- 1 January 1988
- journal article
- research article
- Published by Springer Nature in Microchimica Acta
- Vol. 95 (1-6) , 79-83
- https://doi.org/10.1007/bf01349725
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Fourier transform infrared ellipsometry of thin polymer filmsAnalytical Chemistry, 1986
- Spectroscopic ellipsometry in the infraredInfrared Physics, 1981