Correlations between active species density and iron nitride layer growth in Ar-N2-H2microwave post-discharges
- 14 June 1994
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 27 (6) , 1328-1332
- https://doi.org/10.1088/0022-3727/27/6/034
Abstract
Correlations are demonstrated between the production of N, H and NH active species in an Ar-N2-H2 microwave flowing post-discharge and the thickness of epsilon and gamma ' layers on a pure iron substrate. The Fe2-3N, epsilon -layer thickness increases with N atom density when oxide layers are simultaneously removed by H atoms. A maximum has been found in the post-discharge reactivity when the H2/N2 density ratio is in the 10-3-10-2 range.Keywords
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