Propriétés et structure des couches minces de nitrure de niobium élaborées par pulvérisation cathodique réactive I. Élaboration et propriétés
- 1 April 1974
- journal article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 35 (2) , 181-192
- https://doi.org/10.1016/0022-5088(74)90230-6
Abstract
No abstract availableKeywords
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