Internal Stress Development In Spin Coated Polyimide Films
- 1 January 1991
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- The mechanical behavior of polymer coatings: Solvent removal in polyamic acid filmsPolymer Engineering & Science, 1988
- Residual stress and thermal expansion of spun‐on polyimide filmsJournal of Applied Polymer Science, 1987
- In‐plane orientation of polyimideJournal of Polymer Science: Polymer Physics Edition, 1983
- Preparation and fabrication of aromatic polyimidesJournal of Applied Polymer Science, 1967
- Effects of fillers on residual stresses in coatingsColloid and Polymer Science, 1958