Polyimide-Embedded Semiconductor Ring Lasers.
- 6 December 1989
- proceedings article
- Published by SPIE-Intl Soc Optical Eng
- Vol. 1141, 9-13
- https://doi.org/10.1117/12.961884
Abstract
The fabrication of integrated ring semiconductor lasers has been simplified by embedding the etched rib waveguide structures in polyimide and overcoating with a gold bonding layer. Structures defined by optical lithography lased successfully, while e-beam defined devices with very narrow rib structures were optically lossy, resulting in increased threshold current and evidence of second quantised state operation.© (1989) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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