Outer-rotor polysilicon wobble micromotors
- 17 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Outer rotor surface-micromachined wobble micromotorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A simple fabrication process for polysilicon side-drive micromotorsJournal of Microelectromechanical Systems, 1994
- An experimental technique and a model for studying the operation of harmonic side-drive micrometersIEEE Transactions on Electron Devices, 1993
- Micromotor fabricationIEEE Transactions on Electron Devices, 1992