Multiple Pulse Irradiation Effects in Excimer Laser-Induced Crystallization of Amorphous Si Films
- 1 January 1993
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Excimer Lasbr Induced Crystallization of thin Amorphous Si Films on SiO2: Implications of Crystallized Microstructures for Phase Transformation MechanismsMRS Proceedings, 1992
- Secondary grain growth in thin films of semiconductors: Theoretical aspectsJournal of Applied Physics, 1985
- Physical MetallurgyJournal of the Electrochemical Society, 1977