Effect of substrate temperature on d.c.-sputtered antimony-doped tin-dioxide films

17 February 1977

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 13 (4) , 113-114
https://doi.org/10.1049/el:19770079

Abstract

The conductivity of d.c.-sputtered Sb-doped tin-dioxide films improves with higher substrate substrate temperatures. The conductivity is stable and is not influenced by the substrate material. Heating in open air does not deteriorate the film conductivity. The films are over 90% transparent in the visible spectrum.

Keywords

CONDUCTIVITY
SUBSTRATE TEMPERATURE EFFECT
SB DOPED SNO2
DC SPUTTERED FILMS