Thermal Desorption of H, CO, and CO2 from Silicon Surfaces
- 1 January 1972
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 43 (1) , 232-233
- https://doi.org/10.1063/1.1660815
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Carbide Contamination of Silicon SurfacesJournal of Applied Physics, 1971
- Evidence for carbon contamination on vacuum heated surfaces by electron paramagnetic resonanceSurface Science, 1970
- Coulomb Screening in Intrinsic Medium-Gap Semiconductors and the Electrical Conductivity of Silicon at Elevated TemperaturesPhysical Review B, 1969
- Carbon contamination of Si (111) surfacesSurface Science, 1969
- Cleaning of Silicon Surfaces by Heating in High VacuumJournal of Applied Physics, 1959
- Adsorption of Gases on a Silicon SurfaceThe Journal of Physical Chemistry, 1956