A Microfabricated Rotary Pump

• 1 January 2001
• journal article
• Published by Springer Nature in Biomedical Microdevices
• Vol. 3  (4) , 323-330
• https://doi.org/10.1023/a:1012412916446

Abstract

Keywords

• MICROFLUIDICS
• MICROELECTROMECHANICAL SYSTEMS
• SOFT LITHOGRAPHY
• LAB ON A CHIP
• DIFFUSION