Monte-Carlo Simulations of Si Etching: Comparison with in-situ STM images
- 1 January 1994
- journal article
- Published by EDP Sciences in Microscopy Microanalysis Microstructures
- Vol. 5 (4-6) , 257-267
- https://doi.org/10.1051/mmm:0199400504-6025700
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Etching of Silicon in NaOH Solutions: II . Electrochemical Studies of n‐Si(111) and (100) and Mechanism of the DissolutionJournal of the Electrochemical Society, 1993
- In situ STM observations of the etching of n-Si(111) in NaOH solutionsSurface Science, 1992
- In Situ Fourier‐Transform Electromodulated Infrared Study of Porous Silicon Formation: Evidence for Solvent Effects on the Vibrational LinewidthsJournal of the Electrochemical Society, 1991
- Vertical Etching of Silicon at very High Aspect RatiosAnnual Review of Materials Science, 1979