SOS strain gauge sensors for force and pressure transducers
- 31 August 1991
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 28 (3) , 207-213
- https://doi.org/10.1016/0924-4247(91)85009-d
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Stress in silicon films deposited heteroepitaxially on insulating substrates with particular reference to corundumJournal of Physics D: Applied Physics, 1970