Excimer laser-induced microstructural changes of alumina and silicon carbide

• 1 January 2000
• journal article
• Published by Springer Nature in Journal of Materials Science
• Vol. 35  (15) , 3799-3810
• https://doi.org/10.1023/a:1004821112148

Abstract

Keywords

• CARBIDE
• LASER PULSE
• SILICON CARBIDE
• MATERIAL REMOVAL
• CERAMIC MATERIAL