The molecular drag gauge as a calibration standard
- 1 November 1989
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 7 (6) , 3356-3360
- https://doi.org/10.1116/1.576150
Abstract
The National Institute of Standards and Technology has used molecular drag gauges for six years as transfer standards in the high-vacuum range, 1×10−4 to 1×10−1 Pa. We report on the experience gained with these gauges and, in particular, on their long- and short-term calibration stability, on factors affecting accuracy, on the predictability of the effective accommodation coefficient, and on factors affecting the stability of the offset correction.Keywords
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